What does FOUP mean in Electronics?

This page is about the meanings of the acronym/abbreviation/shorthand FOUP in the Academic & Science field in general and in the Electronics terminology in particular.

Front Opening Unified Pod

Academic & Science » Electronics

Translation

Find a translation for Front Opening Unified Pod in other languages:

Select another language:

  • - Select -
  • Chinese - Simplified 简体中文 (Chinese - Simplified)
  • Chinese - Traditional 繁體中文 (Chinese - Traditional)
  • Spanish Español (Spanish)
  • Esperanto Esperanto (Esperanto)
  • Japanese 日本語 (Japanese)
  • Portuguese Português (Portuguese)
  • German Deutsch (German)
  • Arabic العربية (Arabic)
  • French Français (French)
  • Russian Русский (Russian)
  • Kannada ಕನ್ನಡ (Kannada)
  • Korean 한국어 (Korean)
  • Hebrew עברית (Hebrew)
  • Ukrainian Український (Ukrainian)
  • Urdu اردو (Urdu)
  • Hungarian Magyar (Hungarian)
  • Hindi मानक हिन्दी (Hindi)
  • Indonesian Indonesia (Indonesian)
  • Italian Italiano (Italian)
  • Tamil தமிழ் (Tamil)
  • Turkish Türkçe (Turkish)
  • Telugu తెలుగు (Telugu)
  • Thai ภาษาไทย (Thai)
  • Vietnamese Tiếng Việt (Vietnamese)
  • Czech Čeština (Czech)
  • Polish Polski (Polish)
  • Indonesian Bahasa Indonesia (Indonesian)
  • Romanian Românește (Romanian)
  • Dutch Nederlands (Dutch)
  • Greek Ελληνικά (Greek)
  • Latin Latinum (Latin)
  • Swedish Svenska (Swedish)
  • Danish Dansk (Danish)
  • Finnish Suomi (Finnish)
  • Persian فارسی (Persian)
  • Yiddish ייִדיש (Yiddish)
  • Armenian հայերեն (Armenian)
  • Norwegian Norsk (Norwegian)
  • English English (English)

Definition

What does FOUP mean?

FOUP
FOUP is an acronym for Front Opening Unified Pod or Front Opening Universal Pod.. It is a specialised plastic enclosure designed to hold silicon wafers securely and safely in a controlled environment, and to allow the wafers to be removed for processing or measurement by tools equipped with appropriate load ports and robotic handling systems. FOUPs began to appear along with the first 300mm wafer processing tools in the mid 1990s. The size of the wafers and their comparative lack of rigidity meant that SMIF was not a viable technology. FOUPs were designed with the constraints of 300mm in mind, with the removable cassette being replaced by fins in the FOUP which hold the wafers in place, and the bottom opening door being replaced by a front opening door to allow robot handling mechanisms to access the wafers directly from the FOUP. The weight of a fully loaded 25 wafer FOUP at around 9 kilograms means that automated material handling systems are essential for all but the smallest of fabrication plants. Each FOUP has various coupling plates, pins and holes to allow the FOUP to be located on a load port, and to be manipulated by the AMHS. FOUPs may also contain RF tags that allow them to be identified by readers on tools, in the AMHS etc.

see more »

Embed

Discuss this FOUP abbreviation with the community:

Citation

Use the citation below to add this abbreviation to your bibliography:

Style:MLAChicagoAPA

"FOUP." Abbreviations.com. STANDS4 LLC, 2019. Web. 19 Aug. 2019. <https://www.abbreviations.com/term/2936>.

Free, no signup required:

Add to Chrome

Get instant explanation for any acronym or abbreviation that hits you anywhere on the web!

Free, no signup required:

Add to Firefox

Get instant explanation for any acronym or abbreviation that hits you anywhere on the web!