Fundamentals of Microelectromechanical Systems (MEMS)
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An Introduction to Microelectromechanical Systems Engineering, Second Edition
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DIY MEMS: Fabricating Microelectromechanical Systems in Open Use Labs
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Nano- and Micro-Electromechanical Systems: Fundamentals of Nano- and Microengineering, Second Edition (Nano- And Microscience, Engineering, Technology, and Medicin Book 8)
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An Introduction to Microelectromechanical Systems Engineering
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Mechanics of Microelectromechanical Systems
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MEMS: Micro-Electro-Mechanical Systems
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Microelectromechanical Systems: Advanced Materials and Fabrication Methods
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Principles of Microelectromechanical Systems (IEEE Press)
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MEMS Mechanical Sensors (Microelectromechanical Systems Series.)
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